勤益科大機構典藏:Item 987654321/2333
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    Please use this identifier to cite or link to this item: http://ir.lib.ncut.edu.tw/handle/987654321/2333


    Title: 決定薄膜多項材料性質之簡易方法
    A SIMPLE METHOD FOR SIMULTANEOUSLY DETERMINING MULTI-MATERIAL PROPERTIES OF A FILM'
    Authors: 潘吉祥
    Contributors: 機械工程系
    Department of Mechanical Engineering
    Keywords: 決定薄膜材料;楊氏係數;熱膨脹係數;待測薄膜
    Date: 2003-12
    Issue Date: 2008-12-23 10:26:57 (UTC+8)
    Publisher: 勤益科技大學
    Abstract: 本文提出一次決定薄膜材料殘留應力、楊氏係數及熱膨脹係數之簡易方法，並且可探討三者相互之關係。此方法使用便宜且方便取得之儀器，以及一組簡單之測試結構。測試結構是由待量測薄膜及校準用薄膜經簡易之犧牲層微加工法製作而成，其佔據晶片非常小的區域。所使用的量測儀器為一般的探針台、CCD、影像處理系統及加熱台。本文推導出以測試結構之位移、幾何及材料性質為函數之解析公式，藉此可求得待測薄膜的三項材料係數。本文以無摻雜之低壓化學氣相沉積多晶矽薄膜為待測材料，以CMOS標準氮化矽薄膜為校準材料，作為驗證本方法之效益性。
    Relation: 勤益學報 21(2) p.283-292
    Appears in Collections:[National CHIN-YI University of Technology] 勤益學報

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