Dimension effect on mechanical behavior of silicon micro-cantilever beams

NCUTIR > College of Engineering > Department of Mechanical Engineering > 【機械工程系】期刊論文 > Item 987654321/2338

Please use this identifier to cite or link to this item: http://ir.lib.ncut.edu.tw/handle/987654321/2338

Title:	Dimension effect on mechanical behavior of silicon micro-cantilever beams
Authors:	Liu, Hsien-Kuang;Pan, C.H.;Liu, Pang-Ping
Date:	2008-10
Issue Date:	2008-12-26
Relation:	Measurement, 41(8), 885-895
Appears in Collections:	[Department of Mechanical Engineering] 【機械工程系】期刊論文

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