嵌入式直流伺服電控系統設計及其於阻抗匹配器之應用

NCUTIR > College of Electrical Engineering and Computer Science > Department of Electrical Engineering > 【電機工程系所】博碩士論文 > Item 987654321/3311

Please use this identifier to cite or link to this item: http://ir.lib.ncut.edu.tw/handle/987654321/3311

Title:	嵌入式直流伺服電控系統設計及其於阻抗匹配器之應用 Embedded DC Servo Electrical Control System Design and Its Application on the Impedance Matching Network
Authors:	蘇宏哲 Hong-Jhe Su 洪清寶 Chin-Pao Hung
Contributors:	電機工程系
Keywords:	阻抗匹配器電控系統射頻電漿伺服控制可變電容器 matching network embedded system RF plasma servo control variable capacitor
Date:	2009
Issue Date:	2009-10-12 11:03:32 (UTC+8)
Appears in Collections:	[Department of Electrical Engineering] 【電機工程系所】博碩士論文

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