Solid solution coating of (TiVCrZrHf)N with unusual structural evolution

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题名:	Solid solution coating of (TiVCrZrHf)N with unusual structural evolution
作者:	Du-Cheng Tsaia, Zue-Chin Changb, Li-Yu Kuoa, Tien-Jen Lina, Tai-Nan Linc, Fuh-Sheng Shieua
贡献者:	圖書館
关键词:	Coating materials Nitride materials Microstructure
日期:	2013-02-25
上传时间:	2016-10-13 13:53:03 (UTC+8)
摘要:	In this study, we investigated the microstructure of (TiVCrZrHf)N multi-element coating deposited on Si(100) substrate by magnetron sputtering system. Interestingly, the film showed an unusual structure evolution. A continuous and amorphous initial (TiVCrZrHf)N layer formed on the substrate. As film thickness increased, randomly oriented small (TiVCrZrHf)N grains formed, followed by the development of columnar grains with FCC crystal phase. In contrast to previous studies, the nitride coatings grew on substrates with a 270-nm amorphous interlayer. Under appropriate parameters, the occurrence of the unusual microstructure could be attributed to the sluggish diffusion of the multi-principal components. The maximum hardness of 33.5 GPa was obtained when coating was deposited under substrate bias of − 100 V and at substrate temperatures of 723 K.
關聯:	Surface and Coatings Technology
显示于类别:	[機械工程系(所)] 【機械工程系】期刊論文

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