Effect of N2 flow on the structure and mechanical properties of (CrTaTiVZr)N x coatings processed by reactive magnetron sputtering

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Title:	Effect of N2 flow on the structure and mechanical properties of (CrTaTiVZr)N x coatings processed by reactive magnetron sputtering
Authors:	Zue-Chin Chang, Du-Cheng Tsai and Erh-Chiang Chen
Contributors:	圖書館
Date:	2015-04
Issue Date:	2016-10-14
Abstract:	(CrTaTiVZr)Nx coatings were deposited via reactive radio frequency magnetron sputtering. The effects of N2 flow at 0–8 SCCM on the chemical composition, microstructure, and mechanical properties of the films were investigated. The coatings deposited at a N2 flow of ≤2 SCCM showed a featureless structure with an amorphous phase. When the N2 flow was at 4 SCCM, two distinct layers were observed, namely, the bottom layer (close to the substrate) with an amorphous structure and the top layer with a fibrous structure and face-centered cubic phase. When the N2 flow was further increased, the structure was converted from fibers to columns with larger grains. Accordingly, the maximum hardness value of 36.4 GPa was achieved at a N2 flow of 4 SCCM, thereby indicating that (CrTaTiVZr)Nx coatings may be suitable as hard protective coatings.
Relation:	Journal of Materials Research
Appears in Collections:	[Department of Mechanical Engineering] 【機械工程系】期刊論文

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