This paper proposes the chaos synchronization-based XXY stage real-time extension fault detection; the main characteristic signal is extracted by filtering from the microvibration of stage. The chaos synchronization systems are used to extract the dynamical map of chaotic synchronization error. The Eigen value is extracted from the centroid value of phase plane plot, and the value is analyzed by extension theory, so as to determine the state of XXY stage. The stage states can be detected by the PC based real-time analysis; there are four fault statuses, including normal, X1 motor fault, X2 motor fault and Y motor fault. The dSPACE is used for signal acquisition and monitoring interface making. The real-time fault monitoring and diagnosis can be implemented at the computer side.
