The main goal of this study is to investigate the hysteresis behavior of a piezoelectric actuated micro stage. The hysteresis of piezoelectric actuators (PA) is formulated using the generalized Duhem model (GDM) and a modified charge system search (CSS) is proposed to identify the hysteresis model. Different from the present CSS method, the proposed method applies a construction factor to prevent converging to a local optimum. The modified CSS is used to evaluate the parameters of the GDM to compare with the particle swarm optimization (PSO). The use of MCSS-based optimization is superior to the CSS and the PSO for identification of the GDM. The experimental result also validated the modeling correctness using the proposed method.
