In this study, we synthesize two different sizes of gold nanoparticles (NPs) with uniform size distribution. A novel technique of fabricating gold NPs embedded capacitor devices utilizing chemical self-assembled gold NPs has been developed. Room temperature process and uniform size distribution of gold NPs device are built and characterized. These electronic devices have lower leakage current, no metal diffusion problem, larger memory window, better charge retention time and following Fowler–Nordheim tunneling model. This method enables the possibility of future memory applications to fabricate devices with this simple and versatile technique based on the NPs assembly.
