The Effect of Aging of ZnO, AZO, and GZO films on the Microstructure and Photoelectric Property

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題名:	The Effect of Aging of ZnO, AZO, and GZO films on the Microstructure and Photoelectric Property
作者:	Chang, Zue Chin
貢獻者:	圖書館
關鍵詞:	Aging films Microstructure Photoelectric Property
日期:	2015
上傳時間:	2016-10-14 09:03:24 (UTC+8)
摘要:	RF magnetron sputtering is used on the ceramic targets, each of which contains zinc oxide (ZnO), zinc oxide doped with aluminum (AZO) and zinc oxide doped with gallium (GZO). The XRD analysis showed a preferred orientation along the (002) plane for ZnO, AZO, and GZO films. The AZO film had the best electrical properties; it had the lowest resistivity of 6.6 × 10-4 cm, the best sheet resistance of 2.2 × 10-1 Ω/square, and the highest carrier concentration of 4.3 × 1020 cm-3, as compared to the ZnO and GZO films.
關聯:	International Journal of Chemical
顯示於類別:	[機械工程系(所)] 【機械工程系】期刊論文

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