Numerical Study of Nonlinear Micro Circular Plate Analysis using Hybird Method (H.M.)

NCUTIR > College of Engineering > Department of Mechanical Engineering > 【機械工程系】期刊論文 > Item 987654321/5827

Please use this identifier to cite or link to this item: http://ir.lib.ncut.edu.tw/handle/987654321/5827

Title:	Numerical Study of Nonlinear Micro Circular Plate Analysis using Hybird Method (H.M.)
Authors:	Chin-Chia Liu, Jui-Ho Li and Ming-Chu Hsieh
Contributors:	圖書館
Keywords:	Pull-in voltage Micro circular plate Electrostatic actuator Hybrid Method Differential Transformation
Date:	2015
Issue Date:	2016-10-14 09:52:56 (UTC+8)
Abstract:	Micro-electro-mechanical systems is that the size of component or the movement range is within micro grade, also called the Micromechanical or Microsystems. It is a cross-curricular research field, covering topics such as physics, optics, mechanics, electricity, biology and chemistry. The micro fluid system is an important branch of micro-electro-mechanical systems, it can be widely applied to fields such as medical, chemical analysis and lubricating, etc.. The micro pump is the actuating component of the micro fluid system. The analytical modeling of the micro circular plate devices by electrostatic is problematic due to the complexity of the interactions between the electrostatic coupling effect, residual stress and the nonlinear electrostatic force. Therefore, the dynamic behavior of the micro circular plates is not easily analyzed using traditional analytic methods. Accordingly, this study develops an efficient computational scheme in which the nonlinear governing equation of the coupled electrostatic force acting, residual stress and hydrostatic pressure acting on the micro circular plates system is solved using a hybrid method (H.M.) which differential transformation with finite difference approximation method. In addition, this study shows the dynamic behavior of the micro circular plates by a DC actuating load.
Relation:	Applied Mathematics & Information Sciences
Appears in Collections:	[Department of Mechanical Engineering] 【機械工程系】期刊論文

Files in This Item:

File	Description	Size	Format
Numerical Study of Nonlinear Micro Circular Plate Analysis using Hybird Method (H.M.).pdf		204Kb	Adobe PDF	1437	View/Open

View Licence

Loading...