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    題名: Numerical Study of Nonlinear Micro Circular Plate Analysis using Hybird Method (H.M.)
    作者: Chin-Chia Liu, Jui-Ho Li and Ming-Chu Hsieh
    貢獻者: 圖書館
    關鍵詞: Pull-in voltage
    Micro circular plate
    Electrostatic actuator
    Hybrid Method
    Differential Transformation
    日期: 2015
    上傳時間: 2016-10-14 09:52:56 (UTC+8)
    摘要: Micro-electro-mechanical systems is that the size of component or the movement range is within micro grade, also called the
    Micromechanical or Microsystems. It is a cross-curricular research field, covering topics such as physics, optics, mechanics, electricity,
    biology and chemistry. The micro fluid system is an important branch of micro-electro-mechanical systems, it can be widely applied to
    fields such as medical, chemical analysis and lubricating, etc.. The micro pump is the actuating component of the micro fluid system. The
    analytical modeling of the micro circular plate devices by electrostatic is problematic due to the complexity of the interactions between
    the electrostatic coupling effect, residual stress and the nonlinear electrostatic force. Therefore, the dynamic behavior of the micro
    circular plates is not easily analyzed using traditional analytic methods. Accordingly, this study develops an efficient computational
    scheme in which the nonlinear governing equation of the coupled electrostatic force acting, residual stress and hydrostatic pressure
    acting on the micro circular plates system is solved using a hybrid method (H.M.) which differential transformation with finite difference
    approximation method. In addition, this study shows the dynamic behavior of the micro circular plates by a DC actuating load.
    關聯: Applied Mathematics & Information Sciences
    顯示於類別:[機械工程系(所)] 【機械工程系】期刊論文

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